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Title |
2 |
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Giant Magnetoresistance (GMR) Sensors |
5 |
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Contents |
11 |
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Spintronic Phenomena: Giant Magnetoresistance, Tunnel Magnetoresistance and Spin Transfer Torque |
13 |
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1 Giant Magnetoresistance |
15 |
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1.1 Short History of GMR |
15 |
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1.2 Spin Dependent Transport in Ferromagnetic Transition Metals |
17 |
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1.3 Current in Plane GMR |
18 |
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1.4 Current Perpendicular to Plane GMR |
20 |
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2 Tunnel Magnetoresistance |
23 |
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2.1 Amorphous Magnetic Tunnel Junctions |
23 |
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2.2 TMR in Crystalline Tunnel Junctions |
26 |
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3 Angular Dependence of Transport and Spin Transfer Torque |
28 |
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3.1 Transport for Non-collinear Magnetizations Configuration |
28 |
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3.2 Spin Transfer Torque |
29 |
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4 Conclusion |
34 |
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References |
35 |
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Microfabrication Techniques |
43 |
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1 Introduction |
43 |
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2 Deposition Techniques |
44 |
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2.1 Physical Vapor Deposition |
45 |
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2.2 Chemical Vapor Deposition (CVD) |
47 |
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2.3 Electrodeposition |
48 |
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3 Patterning |
49 |
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3.1 Photolithography |
50 |
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3.2 Pattern Transfer Techniques |
52 |
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4 Conclusions |
55 |
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References |
55 |
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Noise in GMR and TMR Sensors |
58 |
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1 Noise Formalism |
58 |
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1.1 Fluctuations, Average and Distribution |
59 |
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1.2 Correlations |
60 |
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1.3 Frequency Space and Spectral Density |
61 |
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1.4 Sensitivity, Signal to Noise Ratio and Detectivity |
63 |
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2 The Different Sources of Noise |
64 |
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2.1 Separation of Magnetic and Non Magnetic Noise |
64 |
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2.2 Frequency Independent Noise (Thermal or Johnson-Nyquist Noise), Shot Noise |
64 |
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2.3 Low Frequency Noise |
65 |
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2.4 High Frequency Noise and Ferromagnetic Resonance |
68 |
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2.5 External Noise |
68 |
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3 Electronics and Noise Measurements |
68 |
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3.1 Electronics Design |
69 |
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3.2 Additional Remarks and Alternatives |
73 |
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4 Noise in Magnetoresistive Sensors |
74 |
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4.1 Noise in GMR Devices |
74 |
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4.2 Noise in Metallic Magnetic Tunnel Junctions |
77 |
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4.3 Noise in Oxide Tunnel Junctions |
79 |
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5 Conclusion and Perspectives |
79 |
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References |
80 |
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Resistive Sensor Interfacing |
82 |
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1 Sensors and Electronics |
82 |
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2 The Main Parameters of Sensor Electronic Interfaces |
87 |
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3 Small Range Resistive Sensor Interfaces |
89 |
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4 Wide Range Resistive Sensor Interfaces |
96 |
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5 Integrated Microsystems |
105 |
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References |
110 |
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GMR Based Sensors for IC Current Monitoring |
114 |
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1 Introduction |
114 |
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2 Fundamentals |
116 |
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2.1 Sensing Structures |
116 |
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2.2 Sensing Mechanism |
118 |
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2.3 Sensing Configurations |
120 |
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3 Particular Issues in IC Current Monitoring |
122 |
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3.1 Low Signal Level Detection |
122 |
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3.2 Bandwidth |
125 |
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3.3 Joule Heating |
126 |
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4 Current Measurement at the IC Level |
128 |
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4.1 Background on Medium Current Applications |
129 |
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4.2 Electric Current Monitoring at the IC Level |
129 |
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4.3 Power Consumption in ICs |
131 |
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4.4 Analogue Isolators |
132 |
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4.5 Current-to-Time (I-to-t) Converters |
133 |
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5 Monolithic Integration: Trends and Challenges |
136 |
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5.1 CMOS 0.35m |
137 |
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5.2 CMOS 2.5m |
138 |
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6 Conclusions |
139 |
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GMR Sensors in Automotive Applications |
143 |
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1 Introduction |
143 |
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2 GMR Angle Sensing Applications |
144 |
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2.1 BLDC Rotor Position Measurement |
146 |
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2.2 Steering Angle Application |
151 |
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2.3 Angle Error Calibration |
153 |
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3 GMR Speed Sensing Applications |
157 |
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3.1 Crankshaft Speed and Position Measurement |
157 |
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3.2 Wheel Speed Measurement for ABS and ESC Systems |
162 |
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3.3 Magnetic Back Bias of GMR Sensors |
163 |
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4 Summary |
166 |
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References |
166 |
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Compass Applications Using Giant Magnetoresistance Sensors (GMR) |
167 |
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1 Introduction |
167 |
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2 The Earth's Magnetic Field |
170 |
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3 Compass Concepts |
172 |
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4 GMR Sensor Behavior |
175 |
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5 Commercial GMR Compasses |
183 |
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6 Discussion |
186 |
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7 Conclusions |
188 |
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References |
188 |
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Commercial Off-The-Shelf GMR Based Sensor on Board Optos Picosatellite |
191 |
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1 Introduction – A Flight Opportunity |
191 |
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2 Selection of an Appropriate Commercial Off-The-Shelf (COTS) GMR Sensor |
194 |
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3 Biasing Mechanism |
205 |
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4 Qualification of the Sensor |
208 |
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5 Design of the Device |
213 |
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6 Performance |
214 |
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7 Summary and Conclusions |
216 |
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References |
218 |
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High-Spatial Resolution Giant Magnetoresistive Sensors – Part I: Application in Non-Destructive Evaluation |
221 |
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1 Introduction |
221 |
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2 ECT Technique Based Application |
222 |
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2.1 Introduction |
222 |
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2.2 PCB Inspection Based on ECT Technique |
224 |
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2.3 ECT Probe Characteristics and Inspection System |
232 |
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2.4 High-Density PCB Inspection |
241 |
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3 Conclusions |
248 |
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References |
249 |
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High-Spatial Resolution Giant Magnetoresistive Sensors – Part II: Application in Biomedicine |
252 |
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1 Introduction |
252 |
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2 Estimation of Magnetic Fluid Density Inside Tumors |
252 |
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2.1 Introduction |
252 |
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2.2 Analytical Estimation of Magnetic Fluid Parameters |
255 |
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2.3 GMR Needle Probe |
260 |
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2.4 Estimation of Magnetic Fluid Weight Density Using the GMR Needle Probe |
263 |
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3 Conclusions |
278 |
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References |
279 |
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Magnetoresistive Sensors for Surface Scanning |
283 |
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1 Introduction |
283 |
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2 Imaging Sensors Devices: Overview |
285 |
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2.1 Flux Sensors |
285 |
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2.2 Field Sensors |
286 |
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3 Magnetoresistive Sensors in Imaging and Scanning Microscopy |
287 |
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3.1 Arrays of Individual MR Sensors |
289 |
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3.2 Gradiometer Configuration |
290 |
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3.3 Cantilever MR Probes |
290 |
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3.4 Comparison of MR Sensors |
292 |
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4 Magnetoresistive Microscopy for Die Level Fault |
292 |
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4.1 Sensitivity |
295 |
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4.2 Resolution and Sensor Geometry |
298 |
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5 Conclusion |
301 |
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References |
302 |
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Author Index |
308 |
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