Series Editors' Foreword	7
	Preface	9
	Contents	13
	Abbreviations	19
	1 Introduction	21
	1.1 Micro-/Nano-positioning Technique	21
	1.2 Actuators and Sensors	22
	1.3 Piezoelectric Nonlinearity	24
	1.4 Feedforward Control Based on Hysteresis Models	25
	1.4.1 Conventional Hysteresis Model	26
	1.4.2 Intelligent Hysteresis Model	28
	1.4.3 Feedforward Plus Feedback Control	28
	1.5 Robust Feedback Control	29
	1.5.1 Sliding-Mode Control	30
	1.5.2 Model Predictive Control	31
	1.5.3 Model-Reference Adaptive Control	32
	1.5.4 Other Control Strategies	33
	1.6 Position/Force Control in Micromanipulation	33
	1.6.1 Hybrid Control	34
	1.6.2 Impedance Control	34
	1.6.3 Switching Control	35
	1.7 Book Summary	36
	References	36
	Part I Hysteresis-Model-Based FeedforwardControl	41
	2 Feedforward Control Based on Inverse Hysteresis Models	42
	2.1 Introduction	42
	2.2 System Description and Hysteresis Characterization	43
	2.2.1 Experimental Setup	43
	2.2.2 Hysteresis Characterization	44
	2.3 Hysteresis Modeling	47
	2.3.1 Hysteresis Modeling with the Bouc--Wen Model	47
	2.3.2 Hysteresis Modeling with the MPI Model	48
	2.3.3 Hysteresis Modeling with the LSSVM	51
	2.4 Experimental Studies	55
	2.4.1 Bouc--Wen Model Results	55
	2.4.2 MPI Model Results	56
	2.4.3 LSSVM Model Results	59
	2.4.4 Model Capability Comparison	61
	2.4.5 Generalization Study	63
	2.5 Controller Design and Verification	66
	2.5.1 Feedforward Controller Design	66
	2.5.2 Feedforward Plus Feedback Controller Design	68
	2.5.3 Controller Verification	68
	2.6 Chapter Summary	73
	References	73
	3 Feedforward Control Without Modeling Inverse Hysteresis	75
	3.1 Introduction	75
	3.2 Dynamics Modeling of Hysteretic System	76
	3.2.1 Dynamics Modeling with Bouc--Wen Hysteresis	76
	3.2.2 Dynamics Modeling with Intelligent Hysteresis Model	77
	3.3 Hysteresis Modeling Using LSSVM	78
	3.3.1 Regression Model Establishment	78
	3.3.2 LSSVM Modeling	78
	3.4 Experimental Studies on Hysteresis Identification	80
	3.4.1 Experimental Setup	80
	3.4.2 Dynamics Model Identification	81
	3.4.3 Bouc--Wen Model Results	82
	3.4.4 LSSVM Model Results	85
	3.5 Experimental Studies on Hysteresis Compensation	89
	3.5.1 Feedforward Compensation	89
	3.5.2 Feedforward Plus Feedback Control	91
	3.6 Chapter Summary	92
	References	93
	Part II Hysteresis-Model-Free,State-Obser ver-Based Feedback Control	94
	4 Model Predictive Discrete-Time Sliding-Mode Control	95
	4.1 Introduction	95
	4.2 Problem Formulation	97
	4.2.1 Dynamics Modeling of a Nanopositioning System	97
	4.2.2 Sliding-Mode Controller Design	99
	4.2.3 Control Gain Design	101
	4.3 DTSMC Design	102
	4.3.1 Controller Design and Analysis	102
	4.3.2 Tracking Error Bound Analysis	104
	4.4 MPDTSMC Design	105
	4.4.1 MPDTSMC Controller Design	105
	4.4.2 Stability Analysis	107
	4.4.3 State Observer Design	108
	4.4.4 Tracking and Estimation Error Bound Analysis	109
	4.5 Experimental Investigation	110
	4.5.1 Experimental Setup	110
	4.5.2 Hysteresis Characterization	110
	4.5.3 Plant Model Identification	111
	4.5.4 Controller Parameter Design	112
	4.5.5 Simulation Studies	113
	4.5.6 Experimental Testing Results	115
	4.5.7 Discussion on System Performance	118
	4.6 Chapter Summary	119
	References	119
	5 Model Predictive Output Integral Discrete-Time Sliding-Mode Control	121
	5.1 Introduction	121
	5.2 Problem Formulation	122
	5.3 MPOIDSMC Design	123
	5.3.1 OIDSMC Controller Design	123
	5.3.2 MPOIDSMC Controller Design	125
	5.4 Experimental Investigations	130
	5.4.1 Experimental Setup	130
	5.4.2 Plant Model Identification	131
	5.4.3 Controller Parameter Design	132
	5.4.4 Experimental Studies	134
	5.4.5 Discussion on Controller Performance	137
	5.5 Chapter Summary	138
	References	138
	Part III Hysteresis-Model-Free,State-Observer-Free Feedback Control	140
	6 Digital Sliding-Mode Control of Second-Order Systems	141
	6.1 Introduction	141
	6.2 Dynamics Model and Problem Formulation	142
	6.3 DSMC Design	144
	6.4 Experimental Studies	147
	6.4.1 Experimental Setup	147
	6.4.2 Plant Model Identification	148
	6.4.3 Experimental Results	149
	6.4.4 Discussion	159
	6.5 Chapter Summary	159
	References	160
	7 Digital Sliding-Mode Control of High-Order Systems	161
	7.1 Introduction	161
	7.2 Problem Formulation	162
	7.2.1 System Modeling	162
	7.2.2 Disturbance Estimation	164
	7.3 IODSMC Design	165
	7.3.1 Sliding Function Definition	165
	7.3.2 Design of IODSMC	166
	7.3.3 Robust IODSMC Design	168
	7.4 Experimental Setup and Controller Setup	170
	7.4.1 Experimental Setup	170
	7.4.2 Plant Model Identification	171
	7.4.3 Controller Parameter Design	172
	7.5 Experimental Results and Discussion	173
	7.5.1 Set-Point Positioning Results	173
	7.5.2 Sinusoidal Positioning Results	173
	7.5.3 Bandwidth Testing Results	175
	7.5.4 Robustness Testing Results	176
	7.5.5 Further Discussion	178
	7.6 Chapter Summary	178
	References	179
	8 Digital Sliding-Mode Prediction Control	180
	8.1 Introduction	180
	8.2 Problem Formulation	181
	8.2.1 System Modeling	181
	8.2.2 Disturbance Estimation	182
	8.3 DSMC Design	182
	8.3.1 Sliding Function Definition	183
	8.3.2 Design of DSMC	183
	8.3.3 Error Bound Analysis	185
	8.4 DSMPC Design	186
	8.4.1 DSMPC Design	186
	8.4.2 Stability Analysis	188
	8.4.3 Error Bound Analysis	190
	8.5 Experimental Studies and Discussion	190
	8.5.1 Experimental Setup	190
	8.5.2 Plant Model Identification	191
	8.5.3 Controller Parameter Design	192
	8.5.4 Experimental Studies	192
	8.5.5 Further Discussion	196
	8.6 Chapter Summary	197
	References	197
	9 Model-Reference Adaptive Control with Perturbation Estimation	199
	9.1 Introduction	199
	9.2 Dynamics Modeling and Perturbation Estimation	200
	9.2.1 Dynamics Modeling	200
	9.2.2 Perturbation Estimation	201
	9.3 MRACPE Control Design	202
	9.3.1 MRACPE Controller Design	202
	9.3.2 Dead-Zone Modification of Adaptive Laws	205
	9.3.3 Overview of Control Scheme	205
	9.4 Experimental Setup and Controller Setup	206
	9.4.1 Experimental Setup	206
	9.4.2 Statics Testing and Dynamics Model Identification	208
	9.4.3 Controller Setup	209
	9.5 Experimental Results and Discussion	210
	9.5.1 Set-Point Positioning Testing	210
	9.5.2 Sinusoidal Positioning Testing	212
	9.5.3 Control Bandwidth Testing	212
	9.5.4 Discussion	214
	9.6 Chapter Summary	216
	References	217
	Part IV Applications to Micromanipulation	218
	10 Adaptive Impedance Control of Piezoelectric Microgripper	219
	10.1 Introduction	219
	10.2 Problem Formulation	221
	10.2.1 Dynamics Modeling and Perturbation Estimation	222
	10.2.2 Impedance Control Problem	223
	10.3 ADSMGIC Scheme Design	224
	10.3.1 Sliding Function Definition	224
	10.3.2 ADSMGIC Design	225
	10.3.3 Stability Analysis	226
	10.3.4 Evaluation of Steady-State Errors	228
	10.4 Experimental Setup and Controller Setup	229
	10.4.1 Experimental Setup	229
	10.4.2 Force Observer Design	230
	10.4.3 Controller Setup	232
	10.5 Experimental Results and Discussion	234
	10.5.1 Interaction Control Results	234
	10.5.2 Discussion on Control Performance	239
	10.6 Chapter Summary	240
	References	240
	11 Position/Force Switching Control of a Miniature Gripper	243
	11.1 Introduction	243
	11.2 Experimental Setup and Calibration	244
	11.2.1 Working Principle of the Gripper	244
	11.2.2 Experimental Setup	246
	11.2.3 Calibration of Position and Force Sensors	247
	11.2.4 Gripping Range Testing	249
	11.2.5 Frequency Response Testing	250
	11.3 Position/Force Switching Control Scheme Design	251
	11.3.1 Event-Based Switching Control Framework	251
	11.3.2 Incremental DSMC Position Controller	252
	11.3.3 Incremental PID Force Controller	255
	11.3.4 Switching Criterion	255
	11.4 Experimental Investigations and Discussion	256
	11.4.1 Controller Setup	256
	11.4.2 Position/Force Switching Control Results	257
	11.4.3 Further Discussion	259
	11.5 Chapter Summary	262
	References	262
	Index	264